Browsing by Subject electrostatic actuator
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Issue Date | Title | Author(s) |
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2548 | Simulation of metallic MEMS electrostatic actuator for microvalve application | R Pattanakul |
Issue Date | Title | Author(s) |
---|---|---|
2548 | Simulation of metallic MEMS electrostatic actuator for microvalve application | R Pattanakul |